PFLOW3000
PFLOW3000系列质量流量传感器由微机械（MEMS）传感元件制成，该传感元件提供了一种创新的热敏原理，具有良好的线性度，并消除了一些常见气体的气体敏感性。
Measuring range [SCCM]
0 to 2...50 SLPM
Output signal
Linear, 0.5...4.5 VDC, Rs485 Modbus, I2C
Accuracy [± % FS] max.
±(1.5+0.2FS)
Supply voltage [VDC]
8...24
Humidity range
0...100% RH, no condensation
Product description
The PFLOW3000 series of mass flow sensors are made with the micromachined (MEMS) sensing elements that offer an innovative thermal sensing principle with excellent linearity and removal of gas sensitivity of some common gases.
