PFLOW301U-2210空气流量传感器
PFLOW301U-2210空气流量传感器由微机械（MEMS）传感元件制成，该传感元件提供了一种创新的热敏原理，具有良好的线性度，并消除了一些常见气体的气体敏感性
Measuring range [SCCM]
0...30
Output signal
Linear, 1...5 VDC
Accuracy [± % FS] max.
2.5
Supply voltage [VDC]
8...14
Humidity range
0...100% RH, resistant to water condensation
Wetted materials
Silicon carbide, epoxy, PPS, FR4, silicone as static seal
