PFLOW10U-2210空气流量传感器
PFLOW10U-2210空气流量传感器由微机械(MEMS)传感元件制成,该传感元件提供了一种创新的热敏原理,具有良好的线性度,并消除了一些常见气体的气体敏感性
Measuring range [SCCM]
0...10
Output signal
Linear, 1...5 VDC
Accuracy [± % FS] max.
2.5
Supply voltage [VDC]
8...14
Humidity range
0...100% RH, resistant to water condensation
Wetted materials
Silicon carbide, epoxy, PPS, FR4, silicone as static seal